The origin of oxygen in oxide thin films: Role of the substrate

Journal Article · Mon Nov 08 00:00:00 EST 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3515849· OSTI ID:21464560

Schneider, C W; Esposito, M; Marozau, I; Conder, K; Doebeli, M; Yi, Hu; Mallepell, M; Wokaun, A; Lippert, T ^[1]

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1. Department of General Energy Research, Paul Scherrer Institut, CH-5232 Villigen PSI (Switzerland)

During the growth of oxide thin films by pulsed laser deposition, a strong oxygen substrate-to-film transfer has been experimentally observed for SrTiO{sub 3} and LaAlO{sub 3} thin films epitaxially grown on {sup 18}O exchanged SrTiO{sub 3} and LaAlO{sub 3} substrates by secondary ion mass spectrometry depth profiling. This oxygen transfer effect can seriously change the respective thin film properties. Taking the oxygen substrate contribution to the overall oxygen balance into account, original ways to design material properties of oxide thin films can be envisioned like a controlled charge carrier doping of SrTiO{sub 3} thin films.

• OSTI ID: 21464560
• Journal Information: Applied Physics Letters, Vol. 97, Issue 19; Other Information: DOI: 10.1063/1.3515849; (c) 2010 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINATES
CHARGE CARRIERS
CRYSTAL GROWTH
DEPTH
ENERGY BEAM DEPOSITION
EPITAXY
LANTHANUM COMPOUNDS
LASER RADIATION
MASS SPECTRA
MASS SPECTROSCOPY
OXYGEN
OXYGEN 18
PULSED IRRADIATION
STRONTIUM TITANATES
SUBSTRATES
THIN FILMS
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
CRYSTAL GROWTH METHODS
DEPOSITION
DIMENSIONS
ELECTROMAGNETIC RADIATION
ELEMENTS
EVEN-EVEN NUCLEI
FILMS
IRRADIATION
ISOTOPES
LIGHT NUCLEI
NONMETALS
NUCLEI
OXYGEN COMPOUNDS
OXYGEN ISOTOPES
RADIATIONS
RARE EARTH COMPOUNDS
SPECTRA
SPECTROSCOPY
STABLE ISOTOPES
STRONTIUM COMPOUNDS
SURFACE COATING
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS