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Anisotropic diffusion of electrons in RF fields using a multi-term solution of Boltzmann`s equation

Conference ·
OSTI ID:214528
;  [1]
  1. James Cook Univ., Queensland (Australia)

In contrast to the d.c. case, theoretical investigations of charged particle diffusion coefficients in gases in r.f. electric fields have been relatively limited. For d.c. fields it has long been known that the longitudinal diffusion coefficient D{sub L} differs markedly from the transverse diffusion coefficient D{sub T}, even in the case of electrons where the phase space distribution function is often nearly isotropic in velocity space. Anisotropic diffusion in the latter case has its origins in the fact that the mean swarm energy {epsilon} varies with position and for d.c. fields, the ratio D{sub L}/D{sub T} is larger or less than unity according to whether the momentum transfer collision frequency {nu}{sub m}({epsilon}) is a decreasing or increasing function of energy {epsilon}.

OSTI ID:
214528
Report Number(s):
CONF-950749--
Country of Publication:
United States
Language:
English

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