A Novel Solid Electrolyte Oxygen Sensor System for In-Situ Measurement and Process Control

Journal Article · Wed Oct 13 00:00:00 EDT 2010 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3508561· OSTI ID:21428639

Hammer, Frank Uwe ^[1]; Messerschmid, Ernst; Rogg, Markus ^[1]

---

1. Institut fuer Raumfahrtsysteme, Universitaet Stuttgart, Pfaffenwaldring 31, 70569 Stuttgart (Germany)

In 1993 the oxygen partial pressure was firstly measured inside a plasma wind tunnel using conventional {lambda}-probes. Since then, a considerable amount of knowledge has been gained in using these sensors in ground test facilities and space. However, these commercially available sensors were too large in scale and weight. Consequently, a new development of solid electrolyte sensors called FIPEX more feasible for space was initiated. Due to space driven benefits, interest arose to use FIPEX technique in terrestrial applications e.g. to monitor sputter plants for float glass coating. Therefore, the VacuSen registered sensor was developed. The characterization of VacuSen registered at nominal sensor temperature T{sub S} = 680 deg. C resulted in a sensor current according to I{sub S} = b{center_dot}p{sub O2}{sup 0{center_dot}8{+-}0{center_dot}05} I[{mu}A] in the operation range between p{sub tot} = 1{center_dot}10{sup -3} to 5 Pa. From pulse width modulation (PWM) temperature control, additional information allows to measure ptot according to p{sub tot} = a{center_dot}RPWM{sup 0{center_dot}107{+-}0{center_dot}005} thus enlarging the operation range to p{sub tot} = 1{center_dot}10{sup -3} to 1{center_dot}10{sup 5} Pa. A one point calibration routine with air, ideally at p{sub tot} = 5 Pa in order to determine both calibration parameters a and b simultaneously, is proposed.

• OSTI ID: 21428639
• Journal Information: AIP Conference Proceedings, Vol. 1282, Issue 1; Conference: 7. international symposium on applied plasma science, Hamburg (Germany), 31 Aug - 4 Sep 2009; Other Information: DOI: 10.1063/1.3508561; (c) 2010 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
AIR
CALIBRATION
ELECTROLYSIS
MODULATION
OXYGEN
PARTIAL PRESSURE
PLASMA
PLASMA WAVES
PROCESS CONTROL
PULSES
SENSORS
SOLID ELECTROLYTES
TEMPERATURE CONTROL
TEST FACILITIES
CONTROL
ELECTROLYTES
ELEMENTS
FLUIDS
GASES
LYSIS
NONMETALS
PHYSICAL PROPERTIES
THERMODYNAMIC PROPERTIES