Development of Parallel Image Detection System Using Annular Pupils for Scanning Transmission Electron Microscope

Journal Article · Wed Oct 13 04:00:00 EDT 2010 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3508525· OSTI ID:21428628

Matsutani, Takaomi ^[1]; Taya, Masaki; Ikuta, Takashi ^[2]; Tanaka, Takeo ^[3]; Kimura, Yoshihide; Takai, Yoshizo ^[4]; Kawasaki, Tadahiro; Ichihashi, Mikio ^[5]

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1. Kinki University, 3-4-1 Kowakae, Higashiosaka, Osaka, 577-8502 (Japan)
2. Osaka Electro-Communication University, 18-8 Hatsu-cho, Neyagawa, Osaka, 572-8530 (Japan)
3. Osaka Sangyo University, 3-1-1 Nakagaito, Daito, Osaka, 574-8530 (Japan)
4. Osaka University, 2-1, Yamadaoka, Suita, Osaka, 565-0871 (Japan)
5. Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603 (Japan)

A parallel image detection system using an annular pupil for electron optics were developed to realize an increase in the depth of focus, aberration-free imaging and separation of amplitude and phase images under scanning transmission electron microscopy (STEM). Apertures for annular pupils able to suppress high-energy electron scattering were developed using a focused ion beam (FIB) technique. The annular apertures were designed with outer diameter of oe 40 {mu}m and inner diameter of oe32 {mu}m. A taper angle varying from 20 deg. to 1 deg. was applied to the slits of the annular apertures to suppress the influence of high-energy electron scattering. Each azimuth angle image on scintillator was detected by a multi-anode photomultiplier tube assembly through 40 optical fibers bundled in a ring shape. To focus the image appearing on the scintillator on optical fibers, an optical lens relay system attached with CCD camera was developed. The system enables the taking of 40 images simultaneously from different scattered directions.

• OSTI ID: 21428628
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1282; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ANODES
APERTURES
BEAMS
CAMERAS
CHARGE-COUPLED DEVICES
CHARGED PARTICLE DETECTION
DETECTION
ELECTRODES
ELECTRON DETECTION
ELECTRON MICROSCOPY
FIBERS
IMAGES
ION BEAMS
LENSES
MEASURING INSTRUMENTS
MICROSCOPY
OPENINGS
OPTICAL FIBERS
PHOTOMULTIPLIERS
PHOTOTUBES
RADIATION DETECTION
RADIATION DETECTORS
SCANNING ELECTRON MICROSCOPY
SCINTILLATION COUNTERS
SEMICONDUCTOR DEVICES
SOLID SCINTILLATION DETECTORS
TRANSMISSION ELECTRON MICROSCOPY