High-Angular-Resolution Microbeam X-Ray Diffraction with CCD Detector

Journal Article · Tue Apr 06 00:00:00 EDT 2010 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3399252· OSTI ID:21371763

Imai, Yasuhiko; Kimura, Shigeru; Sakaia, Akira ^[1]; Sakata, Osami ^[2]

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1. Japan Synchrotron Radiation Research Institute, SPring-8, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
2. Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama-cho, Toyonaka, Osaka 670-8531 (Japan)

We have introduced a CCD-type two-dimensional X-ray detector for a microbeam X-ray diffraction system using synchrotron radiation, so that we can measure local reciprocal space maps (RSM) of samples rapidly. A local RSM of a strain-relaxed SiGe 004 grown on a Si (001) substrate was measured in higher-angular-resolution and faster than a conventional way. The measurement was achieved in 1 h 40 min. with the 2theta resolution of 80 murad and the spatial resolution of 1.4(h)x0.5(v) {mu}m{sup 2}. The introduction of the CCD enabled us to measure RSMs at many points in a sample, that is, the distribution of strain fields and lattice tilts can be revealed in high-angular- and high-spatial-resolution.

• OSTI ID: 21371763
• Journal Information: AIP Conference Proceedings, Vol. 1221, Issue 1; Conference: 20. international congress on X-ray optics and microanalysis, Karlsruhe (Germany), 15-18 Sep 2009; Other Information: DOI: 10.1063/1.3399252; (c) 2010 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
CHARGE-COUPLED DEVICES
CRYSTAL GROWTH
CRYSTAL LATTICES
GERMANIUM SILICIDES
MAPS
PLATES
SILICON
SPATIAL RESOLUTION
STRAINS
SUBSTRATES
SYNCHROTRON RADIATION
X-RAY DIFFRACTION
BREMSSTRAHLUNG
COHERENT SCATTERING
CRYSTAL STRUCTURE
DIFFRACTION
ELECTROMAGNETIC RADIATION
ELEMENTS
GERMANIUM COMPOUNDS
RADIATIONS
RESOLUTION
SCATTERING
SEMICONDUCTOR DEVICES
SEMIMETALS
SILICIDES
SILICON COMPOUNDS