Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH{sub 3}

Journal Article · Mon Jul 19 00:00:00 EDT 2010 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3466905· OSTI ID:21367019

Behera, Swayambhu ^[1]; Lee, Joe; Graves, David ^[2]; Gaddam, Sneha; Pokharel, Sundari; Wilks, Justin; Pasquale, Frank; Kelber, Jeffry A ^[3]

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1. Department of Physics, University of North Texas, Denton, Texas 76203 (United States)
2. Department of Chemical Engineering, University of California-Berkeley, Berkeley, California 94549 (United States)
3. Department of Chemistry, University of North Texas, Denton, Texas 76203 (United States)

In situ x-ray photoemission spectroscopy (XPS) and ex situ Fourier transform infrared spectroscopy (FTIR) were used to characterize effects on organosilicate films of 147 nm irradiation in the presence of 10{sup -4} Torr NH{sub 3}. XPS and FTIR data indicate Si-O and Si-C bond scission, with nitridation only at Si sites. Photoirradiation causes the surface layer to become enriched in sp{sup 2} carbon. FTIR spectra of silanol formation upon exposure to ambient indicate reactive sites in the bulk have lifetimes of up to six days. XPS data indicate lifetimes of approxminutes for surface states. Nitrogen uptake passivates with longer exposure times, indicating surface densification.

• OSTI ID: 21367019
• Journal Information: Applied Physics Letters, Vol. 97, Issue 3; Other Information: DOI: 10.1063/1.3466905; (c) 2010 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AMMONIA
CARBON
ELECTRONIC STRUCTURE
FILMS
FOURIER TRANSFORM SPECTROMETERS
FOURIER TRANSFORMATION
GLASS
INFRARED SPECTRA
NITRIDATION
NITROGEN
PASSIVATION
PHOTOEMISSION
ULTRAVIOLET RADIATION
ULTRAVIOLET SPECTRA
X-RAY PHOTOELECTRON SPECTROSCOPY
X-RAY SPECTRA
CHEMICAL REACTIONS
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ELEMENTS
EMISSION
HYDRIDES
HYDROGEN COMPOUNDS
INTEGRAL TRANSFORMATIONS
MEASURING INSTRUMENTS
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NONMETALS
PHOTOELECTRON SPECTROSCOPY
RADIATIONS
SECONDARY EMISSION
SPECTRA
SPECTROMETERS
SPECTROSCOPY
TRANSFORMATIONS