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Strongly enhanced incorporation of oxygen into barium titanate based multilayer ceramic capacitors using water vapor

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3460156· OSTI ID:21367010
; ;  [1];  [2]
  1. Institute of Physical Chemistry, RWTH Aachen University, 52056 Aachen (Germany)
  2. Department of Materials Science and Engineering, Seoul National University, Seoul 151-742 (Korea, Republic of)
The reoxidation of sintered BaTiO{sub 3}-based multilayer ceramic capacitors (MLCCs) is currently an empirically determined, but poorly understood, procedure. In this work, the incorporation of oxygen into BaTiO{sub 3}-based MLCCs has been studied by means of isotope exchange annealing ({sup 18}O{sub 2}/{sup 16}O{sub 2}, {sup 1}H{sub 2}{sup 18}O/{sup 1}H{sub 2}{sup 16}O or {sup 2}H{sub 2}{sup 16}O/{sup 1}H{sub 2}{sup 16}O) and subsequent determination of the isotope profiles in the solid by secondary ion mass spectrometry. Oxygen isotope profiles in the barium titanate dielectric can be described by a bulk diffusion coefficient D* and a surface exchange coefficient k*. The values obtained for k* indicate that oxygen incorporation from H{sub 2}O is much faster than from dry O{sub 2}; it thus plays the key role in the reoxidation process.
OSTI ID:
21367010
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 2 Vol. 97; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English