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Production of planar-type overdense plasma with resonant excitation of surface plasmon polaritons

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3225587· OSTI ID:21361824
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  1. College of Electrical and Electronic Engineering, HuaZhong University of Science and Technology, Wuhan 430074 (China)

The present study presents a plasma source, capable of generating overdense plasma below the whole quartz plate while exciting surface plasmon polaritons (SPPs) by means of a subwavelength diffraction grating. The wavelength of surface wave, calculated on either the discharge image or the simulated electric field distribution graph, is about 5.7 cm, which approximates the theoretical value by a calculation of the SPP dispersion equation in overdense plasma. The operation mechanism of plasma heating is attributed to the resonant excitation of SPPs and its dissipation in plasma.

OSTI ID:
21361824
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 6 Vol. 106; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English