Electrical characterization and modeling of the Au/CaF{sub 2}/nSi(111) structures with high-quality tunnel-thin fluoride layer

Journal Article · Wed Apr 15 00:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3110066· OSTI ID:21356116

Vexler, M I ^[1]; Sokolov, N S; Suturin, S M; Banshchikov, A G ^[2]; Tyaginov, S E ^[2]; Grasser, T ^[3]

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1. Institut fuer Elektronische Bauelemente und Schaltungstechnik, TU Braunschweig, Hans-Sommer-Strasse 66, D-38106 Braunschweig (Germany)
2. A. F. Ioffe Physical-Technical Institute of the Russian Academy of Sciences, 26 Polytechnicheskaya Str., 194021 St.-Petersburg (Russian Federation)
3. Christian-Dopper-Laboratory and Institut fuer Mikroelektronik, TU Wien, Gusshausstrasse 25-29, A-1040 Vienna (Austria)

Au/CaF{sub 2}/nSi(111) structures with 4-5 monolayers of epitaxial fluoride are fabricated and electrically tested. The leakage current in these structures was substantially smaller than in similar samples reported previously. Simulations adopting a Franz-type dispersion relation with Franz mass of m{sub F}approx1.2m{sub 0} for carriers in the forbidden band of CaF{sub 2} reproduced the measured current-voltage curves quite satisfactorily. Roughly, these curves could also be reproduced using the parabolic dispersion law with the electron mass of m{sub e}=1.0m{sub 0}, which is a material constant rather than a fitting parameter. Experimental facts and their comparison to modeling results allow qualification of the crystalline quality of fabricated structures as sufficient for device applications.

• OSTI ID: 21356116
• Journal Information: Journal of Applied Physics, Vol. 105, Issue 8; Other Information: DOI: 10.1063/1.3110066; (c) 2009 American Institute of Physics; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CALCIUM FLUORIDES
DISPERSION RELATIONS
ELECTRIC CONDUCTIVITY
ELECTRONS
EPITAXY
GOLD
LAYERS
LEAKAGE CURRENT
MOLECULAR STRUCTURE
SEMICONDUCTOR MATERIALS
SILICON
SIMULATION
ALKALINE EARTH METAL COMPOUNDS
CALCIUM COMPOUNDS
CALCIUM HALIDES
CRYSTAL GROWTH METHODS
CURRENTS
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELEMENTARY PARTICLES
ELEMENTS
FERMIONS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
LEPTONS
MATERIALS
METALS
PHYSICAL PROPERTIES
SEMIMETALS
TRANSITION ELEMENTS