Modelling of the plasma-wall interaction for the positive column of a glow discharge
Conference
·
OSTI ID:212953
- Universitaet Greifswald (Germany); and others
The plasma-wall interaction is of fundamental importance for the understanding of the properties of a plasma and also of great interest in many plasma technological applications such as plasma etching and plasma-assisted deposition processes. We have developed a model which describes the radial distribution of the ion and the electron densities, of the dc electric potential and of the electric field strength in the positive column of a glow discharge. In contrast to earlier models, we show that the necessary boundary conditions result from a system of balance equations of the charge carriers on the insulated wall surrounding the positive column.
- OSTI ID:
- 212953
- Report Number(s):
- CONF-950749--
- Country of Publication:
- United States
- Language:
- English
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