Development of a dielectric-barrier discharge enhanced microplasma jet

Journal Article · Mon May 11 00:00:00 EDT 2009 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3130183· OSTI ID:21294074

Kiriu, Shinya; Miyazoe, Hiroyuki; Takamine, Fumitoshi; Sai, Masaki; Choi, Jai Hyuk; Tomai, Takaaki; Terashima, Kazuo ^[1]

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1. Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa-shi, Chiba 277-8561 (Japan)

A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400-1000 K and 10{sup 13}-10{sup 14} cm{sup -3}, respectively.

• OSTI ID: 21294074
• Journal Information: Applied Physics Letters, Vol. 94, Issue 19; Other Information: DOI: 10.1063/1.3130183; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CAPILLARIES
DIELECTRIC MATERIALS
ELECTRON DENSITY
EMISSION SPECTROSCOPY
GAS FLOW
JETS
PLASMA
PLASMA DENSITY
PLASMA JETS
QUARTZ
TEMPERATURE RANGE 0400-1000 K
TIME RESOLUTION