Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Nature of Defects Induced by Au Implantation in Hexagonal Silicon Carbide Single Crystals

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.3120183· OSTI ID:21289677
;  [1]; ;  [2]
  1. CNRS, CEMHTI Site Cyclotron, 3A rue de la Ferollerie, 45071 Orleans (France)
  2. Universitaet der Bundeswehr Muenchen, Werner-Heisenberg-Weg 39, 85579 Neubiberg (Germany)
Pulsed-slow-positron-beam-based positron lifetime spectroscopy was used to investigate the nature of vacancy defects induced by 20 MeV Au implantation in single crystals 6H-SiC. Preliminary analysis of the data shows that at lower fluence, below 10{sup 14} cm{sup -2}, a positron lifetime of 220 ps has been obtained: it could be associated with the divacancy V{sub Si}-V{sub C} in comparison with the literature. At higher fluence, above 10{sup 15} cm{sup -2}, a positron lifetime of 260-270 ps, increasing with the incident positron energy, has been observed after decomposition of the lifetime spectra. By comparison with lifetime calculations, open-volumes such as quadrivacancy (V{sub Si}-V{sub C}){sub 2} clusters could be associated with this value.
OSTI ID:
21289677
Journal Information:
AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1099; ISSN APCPCS; ISSN 0094-243X
Country of Publication:
United States
Language:
English

Similar Records

Fluence, flux, and implantation temperature dependence of ion-implantation-induced defect production in 4H-SiC
Journal Article · Mon Jan 31 23:00:00 EST 2005 · Journal of Applied Physics · OSTI ID:20665082

Positron studies of defects in ion-implanted SiC
Journal Article · Thu Aug 01 00:00:00 EDT 1996 · Physical Review, B: Condensed Matter · OSTI ID:286667

Interface-structure of the Si/SiC heterojunction grown on 6H-SiC
Journal Article · Tue Jan 06 23:00:00 EST 2015 · Journal of Applied Physics · OSTI ID:22399194