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A diffusive cylindrical plasma-column of dense and low temperature generated by inward diffusion mode

Conference ·
OSTI ID:212803
 [1];  [2]
  1. Gunma Polytechnic College, Takasaki (Japan)
  2. Hachinohe Institute of Technology (Japan)
Diffusion plasmas are often characterized by low temperature, high density and low density of active species. In practice, two types of configuration could be possible to generate the diffusion plasmas. One is that the diffusion plasma is surrounded by the coaxial plasma source and from the periphery of the cylindrical column the plasma diffuses inward toward the central column. The dense plasma is therefore accumulated in the column. This is the configuration which we have adopted in this research. The other configuration is that the discharge plasma is produced in the central part of the cylinder from which the plasma diffuses outward toward the diffusion plasma. It is therefore expected that the former configuration has an advantage of low loss-rate of the plasma and consequently of generating high density plasma compared to the latter configuration. The purposes of the research are to produce dense and low temperature plasma and to explore the conservation mechanism of the electron temperature.
OSTI ID:
212803
Report Number(s):
CONF-950749--
Country of Publication:
United States
Language:
English

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