Influence of exciting frequency on gas and ion rotational temperatures of nitrogen capacitively coupled plasma
- Jiangsu Provincial Key Laboratory of Thin Films, Department of Physics, Suzhou University, Suzhou, 215006 (China)
By using optical emission spectroscopy, the nitrogen gas and ion rotational temperatures in capacitively coupled plasma discharges with different exciting frequencies are investigated. The rotational temperatures are acquired by comparing the measured and calculated spectra of selected transitions with a least-square procedure. It is found that N{sub 2} gas rotational temperature minimum around 13 MHz is the combined effect of ion-dominated heating and electron-dominated heating in the plasma. The influence of exciting frequency on N{sub 2}{sup +} rotational temperature is much more than that of the N{sub 2} molecule, the lower frequency, the higher N{sub 2}{sup +} rotational temperature. Also, N{sub 2}{sup +} rotational temperature is much higher than the corresponding N{sub 2} gas rotational temperature in the plasma driven by low frequencies. These experimental phenomena may be attributed to the effective ion heating and/or possible resonant heating in the bulk plasma under the low-frequency field.
- OSTI ID:
- 21268997
- Journal Information:
- Physics of Plasmas, Vol. 15, Issue 7; Other Information: DOI: 10.1063/1.2952838; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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