Formation processes of nanometer sized particles in low pressure Ar/CH{sub 4} rf plasmas
- Eindhoven University of Technology, Department of Applied Physics P.O. box 513, 5600 MB, Eindhoven (Netherlands)
In this paper, formation and growth processes of nanometer and micrometer sized dust particles in low pressure Ar/CH{sub 4} rf (13.56 MHz) plasmas are investigated as function of temperature in the range 25-100 deg. C. During experiments the pressure was typically 0.8 mbar and the forward power to the plasma was {approx}70 Watt. Measuring the fundamental voltage, current and phase angle together with their harmonics (up to the fourth) gives a good method to monitor the creation and growth of these dust particles in time. Furthermore, laser light scattering measurements are performed to give information about the dust particle density. It has been shown that dust particle formation in these conditions depends greatly on temperature.
- OSTI ID:
- 21251215
- Journal Information:
- AIP Conference Proceedings, Vol. 1041, Issue 1; Conference: 5. international conference on the physics of dusty plasmas, Ponta Degada, Azores (Portugal), 18-23 May 2008; Other Information: DOI: 10.1063/1.2996782; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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