Novel analysis techniques using cluster ion beams
- Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto, 606-8501 (Japan)
Ion beams are used intensively for analytical applications. In order to meet the demands of the recent remarkable progress in material science, new ion beam analysis techniques based on large gaseous cluster ion beams are proposed. Cluster ion beams, which provide an equivalent low energy beam, offer many advantages for analytical technique. For instance, sputtering yields of the cluster ions are one or two orders of magnitude higher than monomer ions and smooth, flat surfaces can be maintained during the sputter depth profiling with cluster ions. These advantages are the result of multiple-collision and high local density energy deposition of cluster ions. Gaseous clusters such as argon or oxygen, as utilized in the analysis are generated by supersonic expansion. The beam current of the cluster ions is a few {mu}A which is sufficient for most analyses.
- OSTI ID:
- 21207977
- Journal Information:
- AIP Conference Proceedings, Vol. 475, Issue 1; Conference: 15. international conference on the application of accelerators in research and industry, Denton, TX (United States), 4-7 Nov 1998; Other Information: DOI: 10.1063/1.59170; (c) 1999 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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