Electrical characterization of an inductively coupled gaseous electronics conference reference cell

Journal Article · Wed Oct 15 04:00:00 EDT 2008 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3000667· OSTI ID:21185863

Singh, S V ^[1]; Pargmann, C ^[2]

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1. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven (Netherlands)
2. German Aerospace Center, Institute of Technical Physics, Langer Grund, D-74239 Hardthausen (Germany)

Plasma parameters and particularly the external electrical operational parameters are examined with respect to mode transition and hysteresis. The external electrical parameters such as antenna current (I{sub c}) and antenna voltage (V{sub c}) amplitudes are measured after the matching network and discussed for an inductively coupled argon discharge. A wide range of discharge conditions by varying applied power (up to 150 W at 13.56 MHz), gas pressure (0.7-7.5 Pa), and electrostatic coupling strength are measured for a gaseous electronics conference radio frequency reference cell. The effect on the power coupling efficiency by varying electrostatic coupling strength is studied via implementing two distinct grounded Faraday shields, in addition to the original nonshielded condition. A brief discussion on the evolution of floating potential, plasma potential, electron density, and electron energy distribution function with power and pressure is also presented mainly in context to mode transitions and hysteresis. Relatively smooth transitions in the plasma parameters and in the external electrical parameters are measured close to H to E mode transition region. Contrary to plasma parameters, however, the reverse transition from E to H mode was found to be abrupt in external parameters. The plasma parameters are measured using a commercial Langmuir probe, whereas the antenna currents and voltages are measured using a homebuilt Rogowski coil and capacitor divider, respectively.

• OSTI ID: 21185863
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 8 Vol. 104; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ANTENNAS
ARGON
CAPACITORS
ELECTRON DENSITY
ENERGY SPECTRA
FARADAY EFFECT
H-MODE PLASMA CONFINEMENT
HIGH-FREQUENCY DISCHARGES
HYSTERESIS
LANGMUIR PROBE
PLASMA
PLASMA DENSITY
PLASMA POTENTIAL
PRESSURE DEPENDENCE
PRESSURE RANGE PA
RADIOWAVE RADIATION
ROGOWSKI COIL