Structural properties of nitrogenated amorphous carbon films: Influence of deposition temperature and radiofrequency discharge power

Journal Article · Wed Oct 01 00:00:00 EDT 2008 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.2951622· OSTI ID:21182665

Lazar, G ^[1]; Bouchet-Fabre, B ^[2]; Zellama, K; Clin, M ^[3]; Ballutaud, D ^[4]; Godet, C ^[5]

---

1. IFIM, Bacau University, Calea Marasesti 157, 600115 Bacau (Romania)
2. LFP, SPAM, CEA-Saclay, 91191 Gif sur Yvette Cedex (France)
3. Laboratoire de Physique de la Matiere Condensee, Faculte des Sciences, Universite de Picardie-Jules Verne, 33 rue Saint-Leu, 80039 Amiens Cedex (France)
4. Laboratoire GEMaC-UMR 8635-CNRS, 92100 Meudon Cedex (France)
5. Institut de Physique de Rennes (UMR 6251-CNRS), Universite de Rennes 1, 35000 Rennes (France)

The structural properties of nitrogenated amorphous carbon deposited by radiofrequency magnetron sputtering of graphite in pure N{sub 2} plasma are investigated as a function of the substrate temperature and radiofrequency discharge power. The film composition is derived from x-ray photoemission spectroscopy, nuclear reaction analysis and elastic recoil detection measurements and the film microstructure is discussed using infrared, Raman, x-ray photoemission and near edge x-ray absorption fine structure spectroscopic results. At low deposition temperature and low radiofrequency power, the films are soft, porous, and easily contaminated with water vapor and other atmospheric components. The concentration of nitrogen in the films is very large for low deposition temperatures ({approx}33.6 at. % N at 150 deg. C) but decreases strongly when the synthesis temperature increases ({approx}15 at. % N at 450 deg. C). With increasing deposition temperature and discharge power values, the main observed effects in amorphous carbon nitride alloys are a loss of nitrogen atoms, a smaller hydrogen and oxygen contamination related to the film densification, an increased order of the aromatic sp{sup 2} phase, and a strong change in the nitrogen distribution within the carbon matrix. Structural changes are well correlated with modifications of the optical and transport properties.

• OSTI ID: 21182665
• Journal Information: Journal of Applied Physics, Vol. 104, Issue 7; Other Information: DOI: 10.1063/1.2951622; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION SPECTROSCOPY
AMORPHOUS STATE
CARBON NITRIDES
FINE STRUCTURE
GRAPHITE
HYDROGEN
INFRARED SPECTRA
MICROSTRUCTURE
NITROGEN
NUCLEAR REACTION ANALYSIS
OXYGEN
PHOTOEMISSION
POROUS MATERIALS
RAMAN SPECTRA
SPUTTERING
TEMPERATURE DEPENDENCE
TEMPERATURE RANGE 0400-1000 K
THIN FILMS
WATER VAPOR
X-RAY PHOTOELECTRON SPECTROSCOPY