Atomic-Resolution Imaging with a Sub-50-pm Electron Probe

Journal Article · Fri Mar 06 04:00:00 EST 2009 · Physical Review Letters

DOI:https://doi.org/10.1103/PHYSREVLETT.102.096101· OSTI ID:21180268

Erni, Rolf; Rossell, Marta D; Kisielowski, Christian; Dahmen, Ulrich ^[1]

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1. National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)

Using a highly coherent focused electron probe in a fifth-order aberration-corrected transmission electron microscope, we report on resolving a crystal spacing less than 50 pm. Based on the geometrical source size and residual coherent and incoherent axial lens aberrations, an electron probe is calculated, which is theoretically capable of resolving an ideal 47 pm spacing with 29% contrast. Our experimental data show the 47 pm spacing of a Ge <114> crystal imaged with 11%-18% contrast at a 60%-95% confidence level, providing the first direct evidence for sub-50-pm resolution in annular dark-field scanning transmission electron microscopy imaging.

• OSTI ID: 21180268
• Journal Information: Physical Review Letters, Journal Name: Physical Review Letters Journal Issue: 9 Vol. 102; ISSN 0031-9007; ISSN PRLTAO
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
CRYSTALS
ELECTRON PROBES
LENSES
RESOLUTION
TRANSMISSION ELECTRON MICROSCOPY