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Electronic and structural properties of molybdenum thin films as determined by real-time spectroscopic ellipsometry

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3117222· OSTI ID:21176101
; ; ; ; ;  [1]
  1. Center for Photovoltaics Innovation and Commercialization (PVIC), University of Toledo, Toledo, Ohio 43606 (United States)
Real-time spectroscopic ellipsometry (RTSE) is shown to be an effective contactless probe of radio frequency magnetron sputtered molybdenum thin films used as the back electrode in chalcopyrite [Cu(In,Ga)Se{sub 2}] solar cells. A series of Mo thin films was sputtered onto soda-lime glass substrates at Ar pressures ranging from 4 to 20 mTorr. RTSE measurements reveal how Ar pressure affects the nucleation and growth mechanisms that influence the films' ultimate grain structure and properties. Determinations of the free electron relaxation times at optical frequencies reveal that higher pressures lead to a smaller average grain size and increased void volume fraction.
OSTI ID:
21176101
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 14 Vol. 94; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English