Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

Journal Article · Mon Mar 30 00:00:00 EDT 2009 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3110056· OSTI ID:21176079

Donko, Z ^[1]; Schulze, J; Czarnetzki, U; Luggenhoelscher, D ^[2]

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1. Research Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, P.O. Box 49, H-1525 Budapest (Hungary)
2. Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Bochum 44780 (Germany)

At low pressures, nonlinear self-excited plasma series resonance (PSR) oscillations are known to drastically enhance electron heating in geometrically asymmetric capacitively coupled radio frequency discharges by nonlinear electron resonance heating (NERH). Here we demonstrate via particle-in-cell simulations that high-frequency PSR oscillations can also be excited in geometrically symmetric discharges if the driving voltage waveform makes the discharge electrically asymmetric. This can be achieved by a dual-frequency (f+2f) excitation, when PSR oscillations and NERH are turned on and off depending on the electrical discharge asymmetry, controlled by the phase difference of the driving frequencies.

• OSTI ID: 21176079
• Journal Information: Applied Physics Letters, Vol. 94, Issue 13; Other Information: DOI: 10.1063/1.3110056; (c) 2009 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ASYMMETRY
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRONS
EXCITATION
HEATING
NONLINEAR PROBLEMS
OSCILLATIONS
PLASMA
PLASMA SIMULATION
PLASMA WAVES
RADIOWAVE RADIATION
RESONANCE
RF SYSTEMS
WAVE FORMS