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Laser ablation and ionization mass spectrometric studies of surface impurities with different geometries

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.47581· OSTI ID:21153723
; ;  [1]
  1. Department of Plasma Physics, KFKI-Research Institute for Particle and Nuclear Physics, H-1525 Budapest 114, P.O. Box 49 (Hungary)

Surface sodium impurity on silicon samples was detected by laser ablation and resonant ionization mass spectrometric methods. Resonant ablation-ionization (RAI) and resonant post-ionization (RPI) arrangements were applied to compare their characteristics. Using the RAI arrangement resonant ionization aided laser plasma ignition process has been observed. Under certain circumstances strong line broadening of the resonance occurred.

OSTI ID:
21153723
Journal Information:
AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 329; ISSN APCPCS; ISSN 0094-243X
Country of Publication:
United States
Language:
English