Surface potential and magnetic properties of La{sub 0.7}Sr{sub 0.3}MnO{sub 3} periodic arrays fabricated by direct electron beam writing
- Department of Materials Science and Engineering, National Taiwan University, Taipei 106-17, Taiwan (China)
- Department of Chemical Engineering and Biotechnology, National Taipei University of Technology, Taipei 106-08, Taiwan (China)
- Graduate Institute of Electro-optical Engineering and Department of Electrical Engineering, National Taiwan University, Taipei 106-17, Taiwan (China)
- Department of Physics, National Taiwan University, Taipei 106-17, Taiwan (China)
It is demonstrated that magnetic periodic arrays can be easily fabricated from direct writing water developable La{sub 0.7}Sr{sub 0.3}MnO{sub 3} electron beam resist. Two unique features of our approach are (1) the patterned La{sub 0.7}Sr{sub 0.3}MnO{sub 3} resist film can be developed using nontoxic and environmentally friendly pure water and (2) either positive or negative patterns can be fabricated depending on the dosage of electron beam. The mechanism of the dual function characteristic of the resist was studied using Kelvin probe microscope. The surface potential of patterned La{sub 0.7}Sr{sub 0.3}MnO{sub 3} resist increases with increasing electron beam dosage due to the changes of resist composition. The formations of periodic magnetic arrays were confirmed by the studies of scanning electron microscope and magnetic force microscope. The magnetization of La{sub 0.7}Sr{sub 0.3}MnO{sub 3} can be enhanced by postsintering the sample at 900 deg. C after electron beam irradiation. We have therefore provided a one-step, simple, and convenient alternative technique for the fabrication of nanoscale magnetic patterns, which form the building blocks for the study of physical properties in periodic magnetic arrays.
- OSTI ID:
- 21137410
- Journal Information:
- Journal of Applied Physics, Vol. 104, Issue 2; Other Information: DOI: 10.1063/1.2957489; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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