Microtopographical Characterization of Microcavities on X-Rays Sensor Array

Journal Article · Tue Apr 15 04:00:00 EDT 2008 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2926840· OSTI ID:21137075

Costa, Manuel F. M. ^[1]

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1. Universidade do Minho, Departamento de Fisica, 4710-057 Braga (Portugal)

A large number of medical imaging methods, such as computed tomography, ultrasound and magnetic resonance imaging, are for quite some time digital. X-ray imaging was kept analogue until recently. Over last half a dozen years' digital radiography systems are being successfully developed. Among other advantages common to other medical imaging methods, digital X-ray imaging allow an important reduction of the X-ray doses involved in different medical diagnosis. The communication herein reports to the microtopographic inspection of laser ablation opened microcavities during development of an X-rays microdetector based on an array of wells filled with scintillator crystals. The wells were obtained by laser ablation of a 500 microns thick aluminum film. X-ray energy is converted to visible light within the crystals and then detected by a photodetector fabricated in a standard CMOS process. Aluminium thick-films were chosen as present good reflectivity in the visible range improving the amount of photons collected at each photodetector. Square wells 100 microns wide and 490 microns deep were targeted. In this communication we will report on the process of optical microtopographic characterization of the aluminium wells. This metrological process was performed in order to optimize the laser ablation system parameter in order to obtain the desired size square wells with almost vertical smooth sidewalls.

• OSTI ID: 21137075
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 992; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ABLATION
ALUMINIUM
BIOMEDICAL RADIOGRAPHY
COMPUTERIZED TOMOGRAPHY
CRYSTALS
DIAGNOSIS
FILMS
LASER RADIATION
NMR IMAGING
PHOSPHORS
PHOTONS
REFLECTIVITY
SENSORS
X RADIATION
X-RAY DETECTION