High frequency columnar silicon microresonators for mass detection

Journal Article · Mon Jul 14 00:00:00 EDT 2008 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2957653· OSTI ID:21123971

Kehrbusch, J; Ilin, E A; Hullin, M; Oesterschulze, E ^[1]

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1. Physik und Technologie der Nanostrukturen, Nano-Bio-Center, Technische Universitaet Kaiserslautern, 67663 Kaiserslautern (Germany)

A simple but effective technological scheme for the fabrication of high frequency silicon columnar microresonators is presented. With the proposed technique the dimensions of the microresonators are controlled on a scale of at least 1 {mu}m. Characterization of the mechanical properties of silicon columns gave resonant frequencies of the lowest flexural mode of 3-7 MHz with quality factors of up to 2500 in air and {approx}8800 under vacuum condition. Columnar microresonators were operated as mass balance with a sensitivity of 1 Hz/fg. A mass detection limit of 25 fg was deduced from experiments.

• OSTI ID: 21123971
• Journal Information: Applied Physics Letters, Vol. 93, Issue 2; Other Information: DOI: 10.1063/1.2957653; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AIR
FABRICATION
MASS
MASS BALANCE
MECHANICAL PROPERTIES
MHZ RANGE 01-100
QUALITY FACTOR
RESONATORS
SEMICONDUCTOR MATERIALS
SENSITIVITY
SILICON