Three-flat test with plates in horizontal posture
Measuring flats in the horizontal posture with interferometers is analyzed in detail, taking into account the sag produced by gravity. A mathematical expression of the bending is provided for a plate supported at three unevenly spaced locations along the edge. It is shown that the azimuthal terms of the deformation can be recovered from a three-flat measuring procedure, while the pure radial terms can only be estimated. The effectiveness of the iterative algorithm for data processing is also demonstrated. Experimental comparison on a set of three flats in horizontal and upright posture is provided.
- OSTI ID:
- 21120723
- Journal Information:
- Applied Optics, Vol. 47, Issue 12; Other Information: DOI: 10.1364/AO.47.002133; (c) 2008 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
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