Side extraction duoPIGatron-type ion source
Journal Article
·
· Review of Scientific Instruments
- High Current Electronics Institute, Russian Academy of Sciences, Tomsk 634055 (Russian Federation)
We have designed and constructed a compact duoPIGatron-type ion source, for possible use in ion implanters, in which ions are extracted from a side aperture in contrast to conventional duoPIGatron sources with axial ion extraction. The size of the side extraction aperture is 1x40 mm{sup 2}. The ion source was developed to study physical and technological aspects relevant to an industrial ion source. The side extraction duoPIGatron has a stable arc, uniformly bright illumination, and dense plasma. The present work describes some operating parameters of the ion source using argon and BF{sub 3}. Total unanalyzed beam currents were 40 mA with Ar at an arc current of 7 A and 13 mA with BF{sub 3} gas at an arc current of 9 A.
- OSTI ID:
- 21103967
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 2 Vol. 79; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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