Velocity distribution of neutral species during magnetron sputtering by Fabry-Perot interferometry

Journal Article · Mon Apr 07 04:00:00 EDT 2008 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2907505· OSTI ID:21101973

Britun, N; Han, J G ^[1]; Oh, S -G ^[2]

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1. Center for Advanced Plasma Surface Technology, Sungkyunkwan University, 300 Chun-Chun-Dong, Jangan-gu, Suwon 440-746 (Korea, Republic of)
2. Department of Physics, Ajou University, Suwon 442-749 (Korea, Republic of)

The velocity distribution of a metallic neutral species sputtered in a dc magnetron discharge was measured using a planar Fabry-Perot interferometer and a hollow cathode lamp as a reference source. The measurement was performed under different angles of view relative to the target surface. The velocity distribution function in the direction perpendicular to the target becomes asymmetrical as the Ar pressure decreases, whereas it remains nearly symmetrical when the line of sight is parallel to the target surface. The average velocity of the sputtered Ti atoms was measured to be about 2 km/s.

• OSTI ID: 21101973
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 14 Vol. 92; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
DISTRIBUTION FUNCTIONS
FABRY-PEROT INTERFEROMETER
HOLLOW CATHODES
INTERFEROMETRY
MAGNETRONS
SPUTTERING
TITANIUM
VELOCITY