Quasistatic simulation of microwave discharges in a spherically symmetric electrode system in nitrogen
- Russian Academy of Sciences, Topchiev Institute of Petrochemical Synthesis (Russian Federation)
Results are presented from one-dimensional quasistatic simulations of steady microwave discharges in a spherically symmetric electrode system in nitrogen at pressures of 1-8 Torr. The computational model includes the equation for calculating the electric field strength in the quasistatic approximation, Poisson's equation, the balance equations describing the kinetics of charged and neutral plasma particles, and the time-independent homogeneous Boltzmann equation for electrons. The processes involving vibrationally excited particles are taken into account by the familiar analytic expression for the vibrational distribution of molecules in the diffusion approximation. It is shown that, because of the electric field nonuniformity, the physical properties (in particular, the plasma ion composition) are different in different discharge regions.
- OSTI ID:
- 21100212
- Journal Information:
- Plasma Physics Reports, Vol. 33, Issue 1; Other Information: DOI: 10.1134/S1063780X07010084; Copyright (c) 2007 Nauka/Interperiodica; Article Copyright (c) 2007 Pleiades Publishing, Ltd; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-780X
- Country of Publication:
- United States
- Language:
- English
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