Insulator surface potential measured by TOF-SIMS
Conference
·
OSTI ID:210662
- Oak Ridge National Lab., TN (United States)
A technique has been developed to determine the electrostatic surface potential of insulating samples which are subject to analysis by secondary ion mass spectrometry (SIMS). A special three-stage reflection time-of-flight (TOF) mass spectrometer was used to simultaneously obtain mass spectra and to measure the shifts of TOF peaks resulting from changes in the sample surface potential. The measured shifts were then used to determine the surface potential of insulators and the effectiveness of charge compensation to a precision of a few volts.
- OSTI ID:
- 210662
- Report Number(s):
- CONF-9505261--
- Country of Publication:
- United States
- Language:
- English
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