Plasma characteristics in a solenoidal inductive/capacitive discharge under a weak dc magnetic field

Journal Article · Mon Oct 15 04:00:00 EDT 2007 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.2800852· OSTI ID:21062055

Lee, Min-Hyong; Chung, Chin-Wook ^[1]

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1. Department of Electrical and Computer Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul, 133-791 (Korea, Republic of)

Plasma parameters such as electron temperatures, plasma potentials, and plasma densities in a solenoidal inductive/capacitive discharge immersed in a weak dc magnetic field are investigated by measuring electron energy distribution functions (EEDF). Measured EEDFs in a dc magnetic field show the typical characteristics of the local electron kinetics. The magnetic field reduces the heat flow to the electrons at the discharge center while it heats up the electrons at the discharge radial boundary. The change in the plasma potential with respect to the magnetic field at various radial positions is also discussed. It is found that the radial profile of the plasma density predominately changes with varying the magnetic field, and the magnetic field can be used to control the radial uniformity of the plasma density in the solenoidal inductive/capacitive discharge.

• OSTI ID: 21062055
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 10 Vol. 14; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRIC DISCHARGES
ELECTRON TEMPERATURE
ELECTRONS
ENERGY SPECTRA
HEAT
HEAT FLUX
MAGNETIC FIELDS
PLASMA
PLASMA DENSITY
PLASMA POTENTIAL