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Title: A New Attachment of the Large Debye-Scherrer Camera at BL02B2 of the SPring-8 for Thin Film X-ray Diffraction

Abstract

We have developed a new attachment for thin film x-ray measurements equipped with the large Debye-Scherrer camera at BL02B2 of the SPring-8. It is quite easy to handle and control the attachment using user-friendly computer programs. It is also notable that the attachment realizes both low-glancing-angle incident beam condition and in-plane measurement condition. The attachment enables us to measure high precision x-ray diffraction data from many kinds of thin films with the Debye-Scherrer camera. Using this attachment we try to analyze some dimensionally controlled thin film structures.

Authors:
 [1]; ;  [2];  [2];  [3]
  1. Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
  2. CREST/JST, Honcho, Kawaguchi, Saitama 332-0012 (Japan)
  3. (Japan)
Publication Date:
OSTI Identifier:
21049352
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 879; Journal Issue: 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436412; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ACCURACY; CAMERAS; COMPUTER CODES; CONTROL; CRYSTAL STRUCTURE; SPRING-8 STORAGE RING; THIN FILMS; X-RAY DIFFRACTION

Citation Formats

Osaka, Keiichi, Kimura, Shigeru, Kato, Kenichi, Takata, Masaki, and RIKEN, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198. A New Attachment of the Large Debye-Scherrer Camera at BL02B2 of the SPring-8 for Thin Film X-ray Diffraction. United States: N. p., 2007. Web. doi:10.1063/1.2436412.
Osaka, Keiichi, Kimura, Shigeru, Kato, Kenichi, Takata, Masaki, & RIKEN, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198. A New Attachment of the Large Debye-Scherrer Camera at BL02B2 of the SPring-8 for Thin Film X-ray Diffraction. United States. doi:10.1063/1.2436412.
Osaka, Keiichi, Kimura, Shigeru, Kato, Kenichi, Takata, Masaki, and RIKEN, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198. Fri . "A New Attachment of the Large Debye-Scherrer Camera at BL02B2 of the SPring-8 for Thin Film X-ray Diffraction". United States. doi:10.1063/1.2436412.
@article{osti_21049352,
title = {A New Attachment of the Large Debye-Scherrer Camera at BL02B2 of the SPring-8 for Thin Film X-ray Diffraction},
author = {Osaka, Keiichi and Kimura, Shigeru and Kato, Kenichi and Takata, Masaki and RIKEN, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198},
abstractNote = {We have developed a new attachment for thin film x-ray measurements equipped with the large Debye-Scherrer camera at BL02B2 of the SPring-8. It is quite easy to handle and control the attachment using user-friendly computer programs. It is also notable that the attachment realizes both low-glancing-angle incident beam condition and in-plane measurement condition. The attachment enables us to measure high precision x-ray diffraction data from many kinds of thin films with the Debye-Scherrer camera. Using this attachment we try to analyze some dimensionally controlled thin film structures.},
doi = {10.1063/1.2436412},
journal = {AIP Conference Proceedings},
number = 1,
volume = 879,
place = {United States},
year = {Fri Jan 19 00:00:00 EST 2007},
month = {Fri Jan 19 00:00:00 EST 2007}
}