A New Attachment of the Large Debye-Scherrer Camera at BL02B2 of the SPring-8 for Thin Film X-ray Diffraction

Journal Article · Fri Jan 19 00:00:00 EST 2007 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2436412· OSTI ID:21049352

Osaka, Keiichi ^[1]; Kimura, Shigeru; Kato, Kenichi ^[2]; Takata, Masaki ^[2]

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1. Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
2. CREST/JST, Honcho, Kawaguchi, Saitama 332-0012 (Japan)

We have developed a new attachment for thin film x-ray measurements equipped with the large Debye-Scherrer camera at BL02B2 of the SPring-8. It is quite easy to handle and control the attachment using user-friendly computer programs. It is also notable that the attachment realizes both low-glancing-angle incident beam condition and in-plane measurement condition. The attachment enables us to measure high precision x-ray diffraction data from many kinds of thin films with the Debye-Scherrer camera. Using this attachment we try to analyze some dimensionally controlled thin film structures.

• OSTI ID: 21049352
• Journal Information: AIP Conference Proceedings, Vol. 879, Issue 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436412; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ACCURACY
CAMERAS
COMPUTER CODES
CONTROL
CRYSTAL STRUCTURE
SPRING-8 STORAGE RING
THIN FILMS
X-RAY DIFFRACTION