Soft X-ray Lithography Beamline at the Siam Photon Laboratory

Journal Article · Fri Jan 19 04:00:00 EST 2007 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2436347· OSTI ID:21049306

Klysubun, P; Chomnawang, N; Songsiriritthigul, P ^[1]

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1. National Synchrotron Research Center, 111 University Ave., Muang District, Nakhon Ratchasima 30000 (Thailand)

Construction of a soft x-ray lithography beamline utilizing synchrotron radiation generated by one of the bending magnets at the Siam Photon Laboratory is finished and the beamline is currently in a commissioning period. The beamline was modified from the existing monitoring beamline and is intended for soft x-ray lithographic processing and radiation biological research. The lithography exposure station with a compact one-dimensional scanning mechanism was constructed and assembled in-house. The front-end of the beamline has been modified to allow larger exposure area. The exposure station for studying radiation effects on biological samples will be set up in tandem with the lithography station, with a Mylar window for isolation. Several improvements to both the beamline and the exposure stations, such as improved scanning speed and the ability to adjust the exposure spectrum by means of low-Z filters, are planned and will be implemented in the near future.

• OSTI ID: 21049306
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 879; ISSN 0094-243X; ISSN APCPCS
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
BEAM BENDING MAGNETS
BEAM MONITORING
BEAM MONITORS
COMMISSIONING
FILTERS
MASKING
MYLAR
PHOTONS
RADIATION EFFECTS
SOFT X RADIATION
SYNCHROTRON RADIATION
THAILAND