Off-Specular X-ray and Neutron Reflectometry for the Structural Characterization of Buried Interfaces

Journal Article · Wed Sep 26 04:00:00 EDT 2007 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2799367· OSTI ID:21032712

Lavery, Kristopher A; Prabhu, Vivek M; Lin, Eric K; Wu, Wen-li ^[1]; Satija, Sushil ^[2]; Wormington, Matthew ^[3]

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1. Polymers Division and Center for Neutron Research, National Institute of Standards and Technology, Gaithersburg, MD (United States)
2. Center for Neutron Research, National Institute of Standards and Technology, Gaithersburg, MD (United States)
3. Bede Scientific Inc., Englewood, CO (United States)

Off-specular reflectivity or diffuse scattering is sensitive to lateral compositional variations at surfaces and interfaces. It is particularly well-suited as a means of measuring the form and amplitude of surface roughness, as well as separating contributions from physical roughness and gradients in material density. The roughness and lateral correlation lengths of model rough surfaces were cross-correlated using neutron and x-ray off-specular reflectivity (OSNR and OSXR, respectively), and using power spectral density (PSD) analysis of atomic force microscopy (AFM) data. These experiments highlight the advantages of the technique for the investigation of buried interfaces while illustrating how x-ray and neutron techniques work complementarily to measure interfacial roughness.

• OSTI ID: 21032712
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 931; ISSN 0094-243X; ISSN APCPCS
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AMPLITUDES
ATOMIC FORCE MICROSCOPY
CORRELATIONS
DIFFUSE SCATTERING
INTERFACES
NEUTRON DIFFRACTION
REFLECTIVITY
ROUGHNESS
SPECTRAL DENSITY
SURFACES
VARIATIONS
X-RAY DIFFRACTION