Zone-Doubling Technique to Produce Ultrahigh-Resolution X-Ray Optics
Journal Article
·
· Physical Review Letters
- Paul Scherrer Institut, CH-5232 Villigen PSI (Switzerland)
- Switzerland
- Laboratori de Llum Sincrotro, E-08193 Bellaterra (Spain)
- Laboratory of Inorganic Chemistry, University of Helsinki, FI-00014 Helsinki (Finland)
A method for the fabrication of ultrahigh-resolution Fresnel zone plate lenses for x-ray microscopy is demonstrated. It is based on the deposition of a zone plate material (Ir) onto the sidewalls of a prepatterned template structure (Si) using an atomic layer deposition technique. This results in a doubling of the effective zone density, thus improving the achievable resolution of x-ray microscopes. Test structures with lines and spaces down to 15 nm were resolved in a scanning transmission x-ray microscope at 1 keV photon energy.
- OSTI ID:
- 21028237
- Journal Information:
- Physical Review Letters, Journal Name: Physical Review Letters Journal Issue: 26 Vol. 99; ISSN 0031-9007; ISSN PRLTAO
- Country of Publication:
- United States
- Language:
- English
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