Synthesis and characteristics of new quaternary Ti-Mo-Si-N coatings by a hybrid coating system

Journal Article · Tue Jan 15 04:00:00 EST 2008 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.2821730· OSTI ID:21020895

Jeon, Jin Woo; Hong, Seung Gyun; Kim, Kwang Ryul; Kim, Kwang Ho ^[1]

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1. Division of Materials Science and Engineering, Pusan National University, Busan 609-735 (Korea, Republic of)

Ternary Ti-Mo-N and new quaternary Ti-Mo-Si-N coatings were synthesized on substrates (AISI D2) and Si wafers by a hybrid coating system of an arc-ion plating technique using a Ti target and a dc magnetron sputtering technique using Mo and Si targets in N{sub 2}/Ar gaseous mixture. The ternary Ti-Mo-N coatings were substitutional solid solutions of (Ti,Mo)N and showed maximum hardness of about 30 GPa at a Mo content of {approx}10 at. %. With the addition of Si, the Ti-Mo-Si-N coating transformed into a nanocomposite consisting of fine (Ti,Mo)N crystallites and an amorphous Si{sub 3}N{sub 4} phase. The hardness of the Ti-Mo-Si(8.8 at. %)-N coatings significantly increased to {approx}48 GPa due to the microstructural change to the nanocomposite containing finer (Ti,Mo)N crystallites by the grain-size refinement effect of Si addition. The averaged friction coefficient of the Ti-Mo-Si-N coatings gradually decreased by increasing the Si content in the Ti-Mo-N coating. The microstructures of Ti-Mo-Si-N coatings were investigated with instrumental analyses of x-ray diffraction, x-ray photoelectron, and high-resolution transmission electron microscopy. In this work, the authors also investigated the effects of substrate bias voltage during deposition on the microstructure and mechanical property of Ti-Mo-Si-N coatings.

• OSTI ID: 21020895
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 1 Vol. 26; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
COATINGS
COMPOSITE MATERIALS
FRICTION FACTOR
GRAIN SIZE
HARDNESS
HYBRIDIZATION
MAGNETRONS
MOLYBDENUM COMPOUNDS
PLATING
PRESSURE RANGE GIGA PA
SILICON NITRIDES
SOLID SOLUTIONS
SPUTTERING
SUBSTRATES
TITANIUM COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
X RADIATION
X-RAY DIFFRACTION
X-RAY PHOTOELECTRON SPECTROSCOPY