Phase configuration, nanostructure evolution, and mechanical properties of unbalanced magnetron-sputtered Ti-C{sub x}-N{sub y} thin films

Journal Article · Thu Nov 15 04:00:00 EST 2007 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.2784719· OSTI ID:21020886

Lu, Y H; Shen, Y G; Zhou, Z F; Li, K Y ^[1]

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1. Department of Materials Physics, Beijing University of Science and Technology, Beijing 100083 (China)

Ti-C{sub x}-N{sub y} thin films with different amounts of C incorporated into TiN{sub 0.87} were deposited on Si(100) substrates at 500 deg. C by reactive unbalanced dc magnetron sputtering. Their phase configuration, nanostructure, and mechanical behavior were investigated by x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), high-resolution transmission electron microscopy (HRTEM), and microindentation measurements. The results indicated that the atomic ratio of (C+N)/Ti played a crucial role in phase configuration, nanostructure evolution, and mechanical behavior. When the ratio was less than one, a nanocrystalline (nc-) Ti(C,N) solid solution was formed by dissolution of C into the TiN lattice. Both microhardness and residual compressive stress values increased with an increase of C content. When the C reached saturation, precipitation of small amounts of sp{sup 2} amorphous (a-) phase appeared with more C incorporation. Further increase of C content (up to {approx}19 at. % C) made the amorphous phase fully wet nanocrystallites, which resulted in the formation of nanocomposite thin films of {approx}5 nm nc-Ti(C,N) nanocrystallites separated by an {approx}0.5 nm amorphous phase comprised mainly of sp{sup 2} disordered C, graphite, and minor CN{sub x}. Thicker amorphous matrices and smaller sized grains followed when C content was further increased. The formation of nanocomposite structure greatly decreased both hardness and residual stress values of thin films. A hardness maximum was believed to be obtained at nc-Ti(C,N) solid solution containing the maximum C amount. Enhancement of the hardness value was attributed to solid solution effect and high residual stress value.

• OSTI ID: 21020886
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 6 Vol. 25; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
AMORPHOUS STATE
CARBON COMPOUNDS
COMPOSITE MATERIALS
CRYSTALS
DEPOSITION
GRAPHITE
MAGNETRONS
MICROHARDNESS
NANOSTRUCTURES
PRECIPITATION
RESIDUAL STRESSES
SOLID SOLUTIONS
SPUTTERING
SUBSTRATES
THIN FILMS
TITANIUM NITRIDES
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
X-RAY PHOTOELECTRON SPECTROSCOPY