Qualitative analysis of a diamondlike carbon film by angle-resolved x-ray photoelectron spectroscopy
Journal Article
·
· Journal of Applied Physics
- Department of Quantum Matter, Graduate School of Advanced Sciences of Matter, Hiroshima University, 1-3-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8530 (Japan)
Angle-resolved x-ray photoelectron spectroscopy was used to investigate the surface of a diamondlike carbon film prepared by the ionized deposition method. We then analyzed the C 1s spectra using the Doniach-Sunjic (DS) [J. Phys. C 3, 285 (1970)] function convoluted with a Gaussian function. Consequently, we obtained four fitting curves for the carbon components in each spectrum, regardless of the assumption of the singularity index ({alpha}) in the DS function, which expresses the asymmetry of the C 1s spectrum. The curves were assigned in the order of binding energy to bulk sp{sup 3} carbon (283.7-283.8 eV), bulk sp{sup 2} carbon (284.2-284.3 eV), surface sp{sup 2} carbon (284.7-284.8 eV), and surface sp{sup 3} (285.3-285.4 eV) carbon. We further considered the influence of the assumption of {alpha}. Consequently, we suggest that the C 1s spectra can be quantitatively analyzed without considering the influences of {alpha} when the ratio of {alpha} for sp{sup 2} carbon to that for sp{sup 3} carbon [{alpha}(sp{sup 2}):{alpha}(sp{sup 3})] is between 10:0 and 5:5. The distribution in the {alpha} ratio may indicate that the sp{sup 2} and the sp{sup 3} carbon atoms can interact with each other (hybridization) and differ from those highly oriented pyrolytic graphite and diamond, respectively.
- OSTI ID:
- 20982895
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 10 Vol. 101; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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