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Title: Influence of the filling gas on plasma focus assisted diamondlike carbon coating at room temperature

Abstract

Amorphous diamondlike carbon films (up to 60 {mu}m thick) are deposited by dense plasma focus system using nitrogen, methane, and neon gases. The peak intensity ratio of the D-band to G-band (I{sub D}/I{sub G}) and the G-peak position in the Raman spectra are used to characterize the films deposited on silicon substrate placed at different axial and angular positions with respect to focus axis. Stress and sp{sup 2} cluster size present in the films are discussed with shift in G-peak position, since higher sp{sup 2} content and residual compressive growth stress shifts the G-peak position to higher frequencies. The peak intensity ratio I{sub D}/I{sub G} is related to sp{sup 3}/sp{sup 2} ratio to estimate the fourfold carbon networks. Thickness values obtained by cross-sectional scanning electron microscopy point toward the high film deposition rates. X-ray diffraction spectra verify the deposition of amorphous carbon a-C films which identifies no crystalline peak.

Authors:
; ;  [1]
  1. Department of Physics, Quaid-i-Azam University, 45320 Islamabad (Pakistan)
Publication Date:
OSTI Identifier:
20982752
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 6; Other Information: DOI: 10.1063/1.2713086; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; AMORPHOUS STATE; CHEMICAL VAPOR DEPOSITION; COATINGS; DIAMONDS; METHANE; NEON; NITROGEN; PLASMA; PLASMA FOCUS; RAMAN SPECTRA; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THIN FILMS; X-RAY DIFFRACTION

Citation Formats

Zeb, Shaista, Murtaza, Ghulam, and Zakaullah, M. Influence of the filling gas on plasma focus assisted diamondlike carbon coating at room temperature. United States: N. p., 2007. Web. doi:10.1063/1.2713086.
Zeb, Shaista, Murtaza, Ghulam, & Zakaullah, M. Influence of the filling gas on plasma focus assisted diamondlike carbon coating at room temperature. United States. doi:10.1063/1.2713086.
Zeb, Shaista, Murtaza, Ghulam, and Zakaullah, M. Thu . "Influence of the filling gas on plasma focus assisted diamondlike carbon coating at room temperature". United States. doi:10.1063/1.2713086.
@article{osti_20982752,
title = {Influence of the filling gas on plasma focus assisted diamondlike carbon coating at room temperature},
author = {Zeb, Shaista and Murtaza, Ghulam and Zakaullah, M.},
abstractNote = {Amorphous diamondlike carbon films (up to 60 {mu}m thick) are deposited by dense plasma focus system using nitrogen, methane, and neon gases. The peak intensity ratio of the D-band to G-band (I{sub D}/I{sub G}) and the G-peak position in the Raman spectra are used to characterize the films deposited on silicon substrate placed at different axial and angular positions with respect to focus axis. Stress and sp{sup 2} cluster size present in the films are discussed with shift in G-peak position, since higher sp{sup 2} content and residual compressive growth stress shifts the G-peak position to higher frequencies. The peak intensity ratio I{sub D}/I{sub G} is related to sp{sup 3}/sp{sup 2} ratio to estimate the fourfold carbon networks. Thickness values obtained by cross-sectional scanning electron microscopy point toward the high film deposition rates. X-ray diffraction spectra verify the deposition of amorphous carbon a-C films which identifies no crystalline peak.},
doi = {10.1063/1.2713086},
journal = {Journal of Applied Physics},
number = 6,
volume = 101,
place = {United States},
year = {Thu Mar 15 00:00:00 EDT 2007},
month = {Thu Mar 15 00:00:00 EDT 2007}
}