Influence of the filling gas on plasma focus assisted diamondlike carbon coating at room temperature
- Department of Physics, Quaid-i-Azam University, 45320 Islamabad (Pakistan)
Amorphous diamondlike carbon films (up to 60 {mu}m thick) are deposited by dense plasma focus system using nitrogen, methane, and neon gases. The peak intensity ratio of the D-band to G-band (I{sub D}/I{sub G}) and the G-peak position in the Raman spectra are used to characterize the films deposited on silicon substrate placed at different axial and angular positions with respect to focus axis. Stress and sp{sup 2} cluster size present in the films are discussed with shift in G-peak position, since higher sp{sup 2} content and residual compressive growth stress shifts the G-peak position to higher frequencies. The peak intensity ratio I{sub D}/I{sub G} is related to sp{sup 3}/sp{sup 2} ratio to estimate the fourfold carbon networks. Thickness values obtained by cross-sectional scanning electron microscopy point toward the high film deposition rates. X-ray diffraction spectra verify the deposition of amorphous carbon a-C films which identifies no crystalline peak.
- OSTI ID:
- 20982752
- Journal Information:
- Journal of Applied Physics, Vol. 101, Issue 6; Other Information: DOI: 10.1063/1.2713086; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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