A method for computing ion energy distributions for multifrequency capacitive discharges

Journal Article · Thu Mar 01 00:00:00 EST 2007 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.2435975· OSTI ID:20982742

Wu, Alan C. F.; Lieberman, M A; Verboncoeur, J P ^[1]

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1. Department of Nuclear Engineering and Department of Electrical Engineering, University of California, Berkeley, California 94720 (United States)

The ion energy distribution (IED) at a surface is an important parameter for processing in multiple radio frequency driven capacitive discharges. An analytical model is developed for the IED in a low pressure discharge based on a linear transfer function that relates the time-varying sheath voltage to the time-varying ion energy response at the surface. This model is in good agreement with particle-in-cell simulations over a wide range of single, dual, and triple frequency driven capacitive discharge excitations.

• OSTI ID: 20982742
• Journal Information: Journal of Applied Physics, Vol. 101, Issue 5; Other Information: DOI: 10.1063/1.2435975; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRIC POTENTIAL
ENERGY SPECTRA
EXCITATION
HIGH-FREQUENCY DISCHARGES
IONS
PLASMA SHEATH
PLASMA SIMULATION
RADIOWAVE RADIATION
TRANSFER FUNCTIONS
WALL EFFECTS