Influence of electron irradiation and heating on secondary electron yields from non-evaporable getter films observed with in situ x-ray photoelectron spectroscopy
- High Energy Accelerator Research Organization (KEK), 1-1 Oho, Tsukuba, Ibaraki 305-0801 (Japan)
Nonevaporable getter (NEG) film has been used for the beam ducts of particle accelerators as a pump having a large area. NEG film has been considered to have a low outgas rate induced by energetic particle irradiation and a low secondary electron yield (SEY). In this article, we focused on SEY measurements and in situ surface characterization of four NEG film samples using x-ray photoelectron spectroscopy (XPS). The NEG samples were TiZrV thin films deposited by magnetron sputtering at 100 or 300 deg. C on stainless steel. In addition, NEG samples saturated by CO gas exposure were prepared. SEY and XPS measurements of the surfaces of NEG samples were carried out under the conditions of as received, after electron beam irradiation, and after heating at 200 deg. C for 24 h. The maximum SEY values of the primary electron energy dependence, {delta}{sub max}, of all NEG samples decreased to around 1 by electron beam irradiation owing to a change in the carbon impurities, such as carbon oxide, carbon hydroxide, and hydrocarbon, to graphite state (graphitization) during the irradiation. After heating, {delta}{sub max} values of the NEG samples without CO gas exposure were also around 1 owing to the carbonization of Ti, Zr, and V. The {delta}{sub max}{approx_equal}1 was remarkably lower than that of copper baked under the same conditions. However, in saturated NEG samples, metal carbides were not produced to a significant extent by heating, and the {delta}{sub max} values did not decrease, showing values of 1.5-1.7.
- OSTI ID:
- 20979489
- Journal Information:
- Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 25, Issue 4; Other Information: DOI: 10.1116/1.2738491; (c) 2007 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
- Country of Publication:
- United States
- Language:
- English
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