Formation and photopatterning of nanoporous titania thin films
- IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120 (United States)
Photopatternable nanoporous titania thin films were generated from mixtures of an organic diblock copolymer, poly(styrene-b-ethylene oxide) (PS-b-PEO), and an oligomeric titanate (OT) prepared from a chelated titanium isopropoxide. The PS-b-PEO templates well-defined microdomains in thin films of the mixtures, which upon thermal treatment at 450 deg. C, become nanopores in titania. Average pore size and porosity are controlled by the molecular weight and loading level of the PS-b-PEO, respectively. Patterns of nanoporous titania were created by selectively exposing UV light on the mixture films. The UV irradiation destroys the chelating bond and induces the cross-linking reaction of the OT. Subsequent wet development followed by thermal treatment gives patterned nanoporous films of anatase phase titania.
- OSTI ID:
- 20971956
- Journal Information:
- Applied Physics Letters, Vol. 90, Issue 23; Other Information: DOI: 10.1063/1.2746081; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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