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Title: Investigation of binary compounds using electron Rutherford backscattering

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.2535986· OSTI ID:20971824
;  [1]
  1. Atomic and Molecular Physics Laboratories, Research School of Physical Sciences and Engineering, Australian National University, Canberra, Australian Capital Territory 0200 (Australia)

High-energy (40 keV) electrons, scattering over large angles, transfer a small fraction of their kinetic energy to the target atoms, in the same way as ions do in Rutherford backscattering experiments. The authors show here that this energy transfer can be resolved and used to determine the mass of the scattering atom. In this way information on the surface composition for thicknesses of the order of 10 nm can be obtained. The authors refer to this technique as 'electron Rutherford backscattering'. In addition the peak width reveals unique information about the vibrational properties (mean kinetic energy) of the scattering atoms. Here the authors demonstrate that the method can be used to identify a number of technologically important compounds.

OSTI ID:
20971824
Journal Information:
Applied Physics Letters, Vol. 90, Issue 7; Other Information: DOI: 10.1063/1.2535986; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English

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