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Title: Capacitance measurements on small parallel plate capacitors using nanoscale impedance microscopy

Abstract

Capacitance values in the picofarad to femtofarad range have been measured on a set of square parallel plate capacitors using a homemade nanoscale impedance microscopy (NIM) device and compared with numerical simulations. A simple analytical model involving the main geometrical parameters is proposed, which correctly fits the experimental results. This model was validated by further measurements on rectangular electrodes and capacitors surrounded by guard rings. The edge effects and stray capacitance contribution were hence determined. Finally, the present resolution of our NIM device was estimated by imaging a tiny 8x8 {mu}m{sup 2} capacitor, confirming the relevance of such reference samples.

Authors:
; ; ;  [1]
+ Show Author Affiliations
  1. Laboratoire de Genie Electrique de Paris (LGEP), UMR 8507 CNRS-Supelec, Universites Paris VI et XI, 11 rue Joliot-Curie, Plateau de Moulon, F-91192 Gif-sur-Yvette Cedex (France)
Publication Date:
OSTI Identifier:
20971788
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 4; Other Information: DOI: 10.1063/1.2437052; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CALIBRATION; CAPACITANCE; CAPACITORS; ELECTRIC IMPEDANCE; ELECTRODES; MICROSCOPY; NANOSTRUCTURES; PLATES; SIMULATION

Citation Formats

Schneegans, Olivier, Chretien, Pascal, Houze, Frederic, and Meyer, Rene. Capacitance measurements on small parallel plate capacitors using nanoscale impedance microscopy. United States: N. p., 2007. Web. doi:10.1063/1.2437052.
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Schneegans, Olivier, Chretien, Pascal, Houze, Frederic, & Meyer, Rene. Capacitance measurements on small parallel plate capacitors using nanoscale impedance microscopy. United States. doi:10.1063/1.2437052.
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Schneegans, Olivier, Chretien, Pascal, Houze, Frederic, and Meyer, Rene. Mon . "Capacitance measurements on small parallel plate capacitors using nanoscale impedance microscopy". United States. doi:10.1063/1.2437052.
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@article{osti_20971788,
title = {Capacitance measurements on small parallel plate capacitors using nanoscale impedance microscopy},
author = {Schneegans, Olivier and Chretien, Pascal and Houze, Frederic and Meyer, Rene},
abstractNote = {Capacitance values in the picofarad to femtofarad range have been measured on a set of square parallel plate capacitors using a homemade nanoscale impedance microscopy (NIM) device and compared with numerical simulations. A simple analytical model involving the main geometrical parameters is proposed, which correctly fits the experimental results. This model was validated by further measurements on rectangular electrodes and capacitors surrounded by guard rings. The edge effects and stray capacitance contribution were hence determined. Finally, the present resolution of our NIM device was estimated by imaging a tiny 8x8 {mu}m{sup 2} capacitor, confirming the relevance of such reference samples.},
doi = {10.1063/1.2437052},
journal = {Applied Physics Letters},
number = 4,
volume = 90,
place = {United States},
year = {Mon Jan 22 00:00:00 EST 2007},
month = {Mon Jan 22 00:00:00 EST 2007}
}
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Journal Article:
DOI:  10.1063/1.2437052
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