Capacitance measurements on small parallel plate capacitors using nanoscale impedance microscopy

Journal Article · Mon Jan 22 00:00:00 EST 2007 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2437052· OSTI ID:20971788

Schneegans, Olivier; Chretien, Pascal; Houze, Frederic; Meyer, Rene ^[1]

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1. Laboratoire de Genie Electrique de Paris (LGEP), UMR 8507 CNRS-Supelec, Universites Paris VI et XI, 11 rue Joliot-Curie, Plateau de Moulon, F-91192 Gif-sur-Yvette Cedex (France)

Capacitance values in the picofarad to femtofarad range have been measured on a set of square parallel plate capacitors using a homemade nanoscale impedance microscopy (NIM) device and compared with numerical simulations. A simple analytical model involving the main geometrical parameters is proposed, which correctly fits the experimental results. This model was validated by further measurements on rectangular electrodes and capacitors surrounded by guard rings. The edge effects and stray capacitance contribution were hence determined. Finally, the present resolution of our NIM device was estimated by imaging a tiny 8x8 {mu}m{sup 2} capacitor, confirming the relevance of such reference samples.

• OSTI ID: 20971788
• Journal Information: Applied Physics Letters, Vol. 90, Issue 4; Other Information: DOI: 10.1063/1.2437052; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CALIBRATION
CAPACITANCE
CAPACITORS
ELECTRIC IMPEDANCE
ELECTRODES
MICROSCOPY
NANOSTRUCTURES
PLATES
SIMULATION