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Title: Effect of enhanced C{sub 2} growth chemistry on nanodiamond film deposition

Abstract

A route to high-purity nanocrystalline diamond films from C{sub 2} dimers and related mechanisms have been investigated by enhancing C{sub 2} growth chemistry in Ar-rich microwave plasmas. Efficient C{sub 2} production by direct dissociation from acetylene causes the micro- to nanocrystal transition with a low threshold Ar concentration of {approx}70% and produces films of {approx}20 nm grains with a distinct visible-Raman peak of diamond. C{sub 2} grows nanodiamond on diamond surfaces but rarely initiates nucleation on foreign surfaces. The phase purity can be improved by increasing the dominance of nanodiamond growth from C{sub 2} over nondiamond growth from CH{sub x}(x=0-3) and large radicals.

Authors:
;  [1]
  1. Department of Applied Science for Electronics and Materials, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580 (Japan)
Publication Date:
OSTI Identifier:
20960147
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 11; Other Information: DOI: 10.1063/1.2713334; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ACETYLENE; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; CRYSTALS; DIAMONDS; DISSOCIATION; IMPURITIES; MICROWAVE RADIATION; NANOSTRUCTURES; NUCLEATION; PHASE TRANSFORMATIONS; PLASMA; RADICALS; RAMAN SPECTRA; THIN FILMS; VISIBLE SPECTRA

Citation Formats

Teii, Kungen, and Ikeda, Tomohiro. Effect of enhanced C{sub 2} growth chemistry on nanodiamond film deposition. United States: N. p., 2007. Web. doi:10.1063/1.2713334.
Teii, Kungen, & Ikeda, Tomohiro. Effect of enhanced C{sub 2} growth chemistry on nanodiamond film deposition. United States. doi:10.1063/1.2713334.
Teii, Kungen, and Ikeda, Tomohiro. Mon . "Effect of enhanced C{sub 2} growth chemistry on nanodiamond film deposition". United States. doi:10.1063/1.2713334.
@article{osti_20960147,
title = {Effect of enhanced C{sub 2} growth chemistry on nanodiamond film deposition},
author = {Teii, Kungen and Ikeda, Tomohiro},
abstractNote = {A route to high-purity nanocrystalline diamond films from C{sub 2} dimers and related mechanisms have been investigated by enhancing C{sub 2} growth chemistry in Ar-rich microwave plasmas. Efficient C{sub 2} production by direct dissociation from acetylene causes the micro- to nanocrystal transition with a low threshold Ar concentration of {approx}70% and produces films of {approx}20 nm grains with a distinct visible-Raman peak of diamond. C{sub 2} grows nanodiamond on diamond surfaces but rarely initiates nucleation on foreign surfaces. The phase purity can be improved by increasing the dominance of nanodiamond growth from C{sub 2} over nondiamond growth from CH{sub x}(x=0-3) and large radicals.},
doi = {10.1063/1.2713334},
journal = {Applied Physics Letters},
number = 11,
volume = 90,
place = {United States},
year = {Mon Mar 12 00:00:00 EDT 2007},
month = {Mon Mar 12 00:00:00 EDT 2007}
}
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