Effect of enhanced C{sub 2} growth chemistry on nanodiamond film deposition

Journal Article · Mon Mar 12 00:00:00 EDT 2007 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2713334· OSTI ID:20960147

Teii, Kungen; Ikeda, Tomohiro ^[1]

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1. Department of Applied Science for Electronics and Materials, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580 (Japan)

A route to high-purity nanocrystalline diamond films from C{sub 2} dimers and related mechanisms have been investigated by enhancing C{sub 2} growth chemistry in Ar-rich microwave plasmas. Efficient C{sub 2} production by direct dissociation from acetylene causes the micro- to nanocrystal transition with a low threshold Ar concentration of {approx}70% and produces films of {approx}20 nm grains with a distinct visible-Raman peak of diamond. C{sub 2} grows nanodiamond on diamond surfaces but rarely initiates nucleation on foreign surfaces. The phase purity can be improved by increasing the dominance of nanodiamond growth from C{sub 2} over nondiamond growth from CH{sub x}(x=0-3) and large radicals.

• OSTI ID: 20960147
• Journal Information: Applied Physics Letters, Vol. 90, Issue 11; Other Information: DOI: 10.1063/1.2713334; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ACETYLENE
CHEMICAL VAPOR DEPOSITION
CRYSTAL GROWTH
CRYSTALS
DIAMONDS
DISSOCIATION
IMPURITIES
MICROWAVE RADIATION
NANOSTRUCTURES
NUCLEATION
PHASE TRANSFORMATIONS
PLASMA
RADICALS
RAMAN SPECTRA
THIN FILMS
VISIBLE SPECTRA