Cantilever spring constant calibration using laser Doppler vibrometry

Journal Article · Fri Jun 15 04:00:00 EDT 2007 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2743272· OSTI ID:20953469

Ohler, Benjamin ^[1]

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1. Veeco Instruments, 112 Robin Hill Road, Santa Barbara, California 93117 (United States)

Uncertainty in cantilever spring constants is a critical issue in atomic force microscopy (AFM) force measurements. Though numerous methods exist for calibrating cantilever spring constants, the accuracy of these methods can be limited by both the physical models themselves as well as uncertainties in their experimental implementation. Here we report the results from two of the most common calibration methods, the thermal tune method and the Sader method. These were implemented on a standard AFM system as well as using laser Doppler vibrometry (LDV). Using LDV eliminates some uncertainties associated with optical lever detection on an AFM. It also offers considerably higher signal to noise deflection measurements. We find that AFM and LDV result in similar uncertainty in the calibrated spring constants, about 5%, using either the thermal tune or Sader methods provided that certain limitations of the methods and instrumentation are observed.

• OSTI ID: 20953469
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 6 Vol. 78; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ACCURACY
ATOMIC FORCE MICROSCOPY
CALIBRATION
LASERS
NOISE
SIGNALS
SPRINGS