Invited Review Article: Atom probe tomography
- Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711 (United States)
The technique of atom probe tomography (APT) is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution (sub-0.3-nm) three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and ceramic materials. This trend toward a broader range of materials and applications is likely to continue.
- OSTI ID:
- 20953383
- Journal Information:
- Review of Scientific Instruments, Vol. 78, Issue 3; Other Information: DOI: 10.1063/1.2709758; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
Similar Records
Accurate Quantification of Si/SiGe Interface Profiles via Atom Probe Tomography
Atom Probe Tomography for Catalysis Applications: A Review