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Title: Wavefront error measurement of high-numerical-aperture optics with a Shack-Hartmann sensor and a point source

Abstract

We developed a new, to the best of our knowledge, test method to measure the wavefront error of the high-NA optics that is used to read the information on the high-capacity optical data storage devices. The main components are a pinhole point source and a Shack-Hartmann sensor. A pinhole generates the high-NA reference spherical wave, and a Shack-Hartmann sensor constructs the wavefront error of the target optics. Due to simplicity of the setup, it is easy to use several different wavelengths without significant changes of the optical elements in the test setup. To reduce the systematic errors in the system, a simple calibration method was developed. In this manner, we could measure the wavefront error of the NA 0.9 objective with the repeatability of 0.003{lambda} rms ({lambda}=632.8 nm) and the accuracy of 0.01{lambda} rms.

Authors:
; ;
Publication Date:
OSTI Identifier:
20929650
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Optics; Journal Volume: 46; Journal Issue: 9; Other Information: DOI: 10.1364/AO.46.001411; (c) 2007 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ACCURACY; APERTURES; CALIBRATION; CAPACITY; ERRORS; MEMORY DEVICES; OPTICS; POINT SOURCES; REMOTE SENSING; TESTING; WAVELENGTHS

Citation Formats

Lee, Jin-Seok, Yang, Ho-Soon, and Hahn, Jae-Won. Wavefront error measurement of high-numerical-aperture optics with a Shack-Hartmann sensor and a point source. United States: N. p., 2007. Web. doi:10.1364/AO.46.001411.
Lee, Jin-Seok, Yang, Ho-Soon, & Hahn, Jae-Won. Wavefront error measurement of high-numerical-aperture optics with a Shack-Hartmann sensor and a point source. United States. doi:10.1364/AO.46.001411.
Lee, Jin-Seok, Yang, Ho-Soon, and Hahn, Jae-Won. Tue . "Wavefront error measurement of high-numerical-aperture optics with a Shack-Hartmann sensor and a point source". United States. doi:10.1364/AO.46.001411.
@article{osti_20929650,
title = {Wavefront error measurement of high-numerical-aperture optics with a Shack-Hartmann sensor and a point source},
author = {Lee, Jin-Seok and Yang, Ho-Soon and Hahn, Jae-Won},
abstractNote = {We developed a new, to the best of our knowledge, test method to measure the wavefront error of the high-NA optics that is used to read the information on the high-capacity optical data storage devices. The main components are a pinhole point source and a Shack-Hartmann sensor. A pinhole generates the high-NA reference spherical wave, and a Shack-Hartmann sensor constructs the wavefront error of the target optics. Due to simplicity of the setup, it is easy to use several different wavelengths without significant changes of the optical elements in the test setup. To reduce the systematic errors in the system, a simple calibration method was developed. In this manner, we could measure the wavefront error of the NA 0.9 objective with the repeatability of 0.003{lambda} rms ({lambda}=632.8 nm) and the accuracy of 0.01{lambda} rms.},
doi = {10.1364/AO.46.001411},
journal = {Applied Optics},
number = 9,
volume = 46,
place = {United States},
year = {Tue Mar 20 00:00:00 EDT 2007},
month = {Tue Mar 20 00:00:00 EDT 2007}
}