Rising Microwave Frequency of a Broad-Ion-Beam ECR Source with Cylindrically Comb-Shaped Magnetic Field Configuration

Journal Article · Mon Nov 13 04:00:00 EST 2006 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2401538· OSTI ID:20891841

Asaji, Toyohisa ^[1]; Kato, Yushi; Sasaki, Hiroshi; Kubo, Takashi; Sato, Fuminobu; Iida, Toshiyuki ^[1]; Saito, Junji ^[2]

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1. Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871 (Japan)
2. Development Center of Advanced Technology, Tateyama Machine Co., Ltd., 30 Shimonoban, Toyama, 930-1305 (Japan)

An 11-13 GHz electron cyclotron resonance (ECR) plasma source with a cylindrically comb-shaped magnetic field configuration has been examined in order to apply to ion beam processing. The ion saturation current density has been measured using a Langmuir probe. It was found that the ion density linearly increases as gas pressure and microwave power increases. The maximum ion density at 13 GHz microwaves is 37.4 mA/cm2 under low microwave power. The ion beam extractor which has multihole apertures has been constructed at the end of the magnet. The ion beam current has reached 20 mA at the microwave power of only 300 W. The ion beam current has clearly increased by rising microwave frequency as well as the tendency of the plasma density.

• OSTI ID: 20891841
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 866; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CURRENT DENSITY
ECR ION SOURCES
ELECTRON CYCLOTRON-RESONANCE
GHZ RANGE 01-100
ION BEAMS
ION DENSITY
LANGMUIR PROBE
MAGNETIC FIELD CONFIGURATIONS
MAGNETS
MICROWAVE RADIATION
PLASMA
PLASMA DENSITY
PLASMA PRODUCTION