Experimental study and global model of inductively coupled CF{sub 4}/O{sub 2} discharges
- Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555 (Japan)
Experiments with a Langmuir probe and optical emission spectroscopy combined with actinometry were carried out in inductive CF{sub 4}/O{sub 2} discharges at three pressures of 8, 15, and 25 mTorr. The measured electron energy probability functions are approximately Maxwellian at any oxygen content. The measured electron density decreases with increasing the oxygen in the oxygen content below 20%, beyond which it remains nearly constant. On the other hand, the measured electron temperature is not sensitive to the content. The atomic fluorine density estimated by actinometry increases markedly as oxygen is mixed to CF{sub 4} discharges, and then reaches the maximum around the oxygen content of 20%-30%, beyond which it decreases with increasing oxygen content. The atomic oxygen density increases with the increase in the oxygen content except for the oxygen content higher than 90%. A global model for electronegative plasma is used in order to investigate the plasma chemistry in CF{sub 4}/O{sub 2} discharges assuming the Maxwellian electron energy distribution. The model results are compared with the experimental results, obtaining reasonably good agreement.
- OSTI ID:
- 20884721
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 6 Vol. 100; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CARBON TETRAFLUORIDE
ELECTRON DENSITY
ELECTRON TEMPERATURE
ELECTRONS
EMISSION SPECTROSCOPY
ENERGY SPECTRA
FLUORINE
HIGH-FREQUENCY DISCHARGES
LANGMUIR PROBE
OXYGEN
PLASMA
PLASMA DENSITY
PROBABILITY